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Thermal infrared detector having a small thermal time constant and method of producing the same
Thermal infrared detector having a small thermal time constant and method of producing the same
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机译:具有小的热时间常数的热红外探测器及其制造方法
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摘要
In an area of a diaphragm 5 as an infrared photosensitive portion of a thermal infrared detector, a fourth dielectric protective film 8c is etched and reduced in thickness to form a fifth dielectric protective film 8d so that the thickness of the diaphragm 5 as a whole is reduced. With this structure, the thermal capacity of the diaphragm 5 is decreased and the thermal time constant is reduced. This enables the thermal infrared detector to be operated at a high frame rate. A bolometer thin film 7 is formed throughout an entire surface of the diaphragm 5. 展开▼
机译:在作为热红外检测器的红外光敏部分的膜片 5 B>的区域中,蚀刻并还原了第四介电保护膜 8 B> c I>通过在厚度上形成第五介电保护膜 8 B> d I>,从而减小隔膜 5 B>的整体厚度。采用这种结构,膜片 5 B>的热容量减小并且热时间常数减小。这使得热红外检测器能够以高帧频运行。在隔膜 5的整个表面上形成辐射热计薄膜 7 B>。 B>
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