OPTICAL ALIGNMENT SYSTEM, OPTICAL ALIGNMENT METHOD, AND REGULATING METHOD OF OPTICAL ALIGNMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an optical alignment system for performing optical post-correction in a minute optical circuit, and to provide an optical alignment method performed in the system, and a regulating method of the system.;SOLUTION: The optical alignment system 100 is provided with optical paths 24, 26, 28 and 30 connecting optical components in the minute optical circuit 102 having a plurality of the optical components. The optical alignment system 100 comprises a plurality of optical alignment elements 104a and 104b used for performing the optical post-correction in the optical paths 24, 26, 28 and 30.;COPYRIGHT: (C)2004,JPO