SYSTEM AND METHOD FOR TRANSPORTING SUBSTRATE CARRIERS OF SMALL LOT SIZE BETWEEN PROCESSING TOOLS

摘要

PPROBLEM TO BE SOLVED: To provide a method of managing goods in process in a production facility for small lot size semiconductor devices. PSOLUTION: The carrying system includes a production facility for small lot size semiconductor devices having a plurality of processing tools, and a high speed transportation system being adapted to transport small lot size substrate carriers between the processing tools. The carrying method includes steps for lengthening the average cycle time of low priority substrates in the production facility for small lot size semiconductor devices, for shortening the average cycle time of high priority substrates in the production facility for small lot size semiconductor devices, and for sustaining a specified level of goods in process in the production facility for small lot size semiconductor devices. PCOPYRIGHT: (C)2004,JPO&NCIPI