ELECTRON-BEAM TUBE, CONTROL METHOD FOR ELECTRON BEAM AND ELECTRON BEAM IRRADIATION EQUIPMENT APPLYING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an electron beam tube for irradiating an electron beam with a constitution for relaxing accuracy of assembling positional relation of an electron source, a cathode electrode and an irradiation window, and to provide a control method for electron beam and an electron beam irradiation equipment using them.;SOLUTION: A pair of first electrodes facing to each other putting the electron source in between and a pair of second electrodes facing to each other putting the electron source in between, placed on the side of the pair of first electrodes, are arranged. By impressing specific voltages individually to the first and the second electrodes, the electron beam is controlled.;COPYRIGHT: (C)2004,JPO