MANUFACTURING PROCESS OF HIGH PURITY CERIUM OXIDE ABRASIVE, AND HIGH PURITY CERIUM OXIDE ABRASIVE OBTAINED BY THE PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing process of a high purity cerium oxide abrasive that has a lower content of coarse particles, yet maintains a higher polishing power and an excellent cleaning performance.;SOLUTION: The manufacturing process of the high purity cerium oxide abrasive comprises a pulverizing process for a raw material for the cerium oxide abrasive, a firing process for the pulverized raw material and a crushing process for the fired raw material. A carbonate of cerium based rare earths with ≥ 90% of CeO₂/TREO (total rare earth oxides) is used for the raw material. Monooxy cerium carbonate is formed from the carbonate of cerium based rare earths and the monooxy cerium carbonate is pulverized in the raw material pulverizing process and fired at 600°C-1,200°C in the subsequent firing process.;COPYRIGHT: (C)2004,JPO