OPTICAL PROFILER FOR ULTRA-SMOOTH SURFACE BASED ON RIGHT-ANGLED INCIDENT BEAM DEFLECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical profiler for an ultra-smooth surface, such as a magnetic recording disk, which imparts a beam deflection made incident at a right angle to the target surface to be profiled.;SOLUTION: A linearly polarized laser beam of the 1st polarization is focused on this target surface in the direction of incidence at a right angle. This beam is reflected from the focal point along the original trajectory. An optical device for changing the polarization of the reflected beam into the 2nd polarization is arranged. The reflected beam with the 2nd polarization is guided onto a position sensitive detector for evaluation.;COPYRIGHT: (C)2005,JPO&NCIPI