METHOD TO PREDICT BEHAVIOR OF INJECTED ATOM AND DEFECTIVE INGREDIENT

摘要

PPROBLEM TO BE SOLVED: To provide a method to predict behavior of injected atoms and defective ingredients in a substrate lattice formed from substrate material to improve electronic device performance. PSOLUTION: This is a technique to predict behavior of injected atoms and defective ingredients in a substrate lattice formed from substrate material to obtain basic data for micro process aggregation that may be generated at the time of one or more material process operations. The data include those showing the energetics and structure of a certain status that may be generated at the time of process kinetics and material process operations in micro process aggregation. From the basic data and external conditional aggregation, the distribution of injected atoms and defective ingredients in the substrate lattice is predicted. The distribution of one or more high-speed ingredients is predicted after the concentration of each specific high-speed ingredient is calculated by solving a primary relation in the time period before the high-speed ingredient reaches its pseudo-steady status, and the concentration of the high-speed ingredient is calculated by solving a secondary relation based on other ingredients following the foregoing time period. The pseudo-steady status of the high-speed ingredient means that the concentration of the high-speed ingredient is determined by the concentration of other ingredients. PCOPYRIGHT: (C)2005,JPO&NCIPI