METHOD AND APPARATUS FOR DETECTING UNEVENNESS DEFECT

摘要

PPROBLEM TO BE SOLVED: To highly accurately and automatically detect unevenness defects of a screen regardless of the size of the defects, and to perform quantitative evaluation on the detected unevenness defects by providing a constitution in which a threshold is automatically determined on the basis of luminance statistical data in a detection image. PSOLUTION: The screen to be inspected 10 is imaged by a CCD camera 6. The difference between the image captured by a computer 7 an a background image 14 is acquired to create the inspection image (background difference image) 15. A plurality of stages of image smoothing processing is performed on the inspection image or its reduced image to create first and second smoothed images 16 and 17. Differential processing is performed between the inspection image or its reduced image and the first smoothed image 16 and the first smoothed image 16 and the second smoothed image 17. Luminance data in the images acquired by the differential processing is statistically computed. On the basis of the statistical data, the threshold value is determined to extract defect candidates, and evaluation values of the defect candidates are computed. PCOPYRIGHT: (C)2004,JPO&NCIPI