MEASURING DEVICE FOR SURFACE REFLECTIVITY SPECTRUM OF ANTI-REFLECTION COATING ON OPTICALLY TRANSPARENT FILM, AND DEPOSITION DEVICE EQUIPPED WITH THE MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To measure a surface reflectivity spectrum of an anti-reflection coating practically accurately in situ.;SOLUTION: The surface reflectivity spectrum of the deposited anti-reflection coating is calculated from a reflectivity spectrum only from the surface of a plastic film acquired by performing back reflection correction by multiple reflection from a synthetic reflected light spectrum from the surface and the back of the plastic film 1 before deposition of the anti-reflection coating, and a reflectivity spectrum only from the surface of the plastic film acquired by correcting the synthetic reflected light spectrum from the surface and the back of the plastic film 1 after deposition of the anti-reflection coating, by a multiple reflection formula based on each reflected light spectrum from the surface and the back of the plastic film 1 before deposition of the anti-reflection coating.;COPYRIGHT: (C)2004,JPO