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SENSOR CHIP, MANUFACTURING METHOD FOR SENSOR CHIP, AND SENSOR USING SENSOR CHIP
SENSOR CHIP, MANUFACTURING METHOD FOR SENSOR CHIP, AND SENSOR USING SENSOR CHIP
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机译:传感器芯片,传感器芯片的制造方法以及使用传感器芯片的传感器
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摘要
PROBLEM TO BE SOLVED: To reduce a noise and to provide high sensitivity, in a sensor chip used for a sensor for detecting, by light, a local plasmon resonance condition on a surface of a fine metal particulate to analyze a sample in the vicinity of the metal particulate.;SOLUTION: This sensor chip is constituted of a holding member comprising polystyrene and having a plurality of first micropores independent each other along a direction substantially perpendicular to the surface, and metal fine particulates comprising gold (Au) held independently each other respectively inside the plurality of micropores. The micropores are formed by providing an anodic-oxidation alumina film 12 on a surface 11a of a polystyrene substrate 11, by masking the alumina film 12, and by etching the surface 11a of the polystyrene substrate 11.;COPYRIGHT: (C)2005,JPO&NCIPI
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