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SENSOR CHIP, MANUFACTURING METHOD FOR SENSOR CHIP, AND SENSOR USING SENSOR CHIP

机译:传感器芯片,传感器芯片的制造方法以及使用传感器芯片的传感器

摘要

PROBLEM TO BE SOLVED: To reduce a noise and to provide high sensitivity, in a sensor chip used for a sensor for detecting, by light, a local plasmon resonance condition on a surface of a fine metal particulate to analyze a sample in the vicinity of the metal particulate.;SOLUTION: This sensor chip is constituted of a holding member comprising polystyrene and having a plurality of first micropores independent each other along a direction substantially perpendicular to the surface, and metal fine particulates comprising gold (Au) held independently each other respectively inside the plurality of micropores. The micropores are formed by providing an anodic-oxidation alumina film 12 on a surface 11a of a polystyrene substrate 11, by masking the alumina film 12, and by etching the surface 11a of the polystyrene substrate 11.;COPYRIGHT: (C)2005,JPO&NCIPI
机译:解决的问题:为了减少噪声并提供高灵敏度,在用于传感器的传感器芯片中,该传感器芯片用于通过光检测细金属颗粒表面上的局部等离振子共振条件,以分析附近的样品。解决方案:该传感器芯片由一个包含聚苯乙烯的保持部件组成,该保持部件具有沿基本垂直于表面的方向彼此独立的多个第一微孔,以及彼此独立保持的包含金(Au)的金属微粒分别在多个微孔内部。通过在聚苯乙烯衬底11的表面11a上提供阳极氧化氧化铝膜12,遮盖氧化铝膜12并蚀刻聚苯乙烯衬底11的表面11a来形成微孔。版权所有:(C)2005,日本特许厅

著录项

  • 公开/公告号JP2004279364A

    专利类型

  • 公开/公告日2004-10-07

    原文格式PDF

  • 申请/专利权人 FUJI PHOTO FILM CO LTD;

    申请/专利号JP20030074903

  • 发明设计人 MUKAI ATSUSHI;

    申请日2003-03-19

  • 分类号G01N21/27;

  • 国家 JP

  • 入库时间 2022-08-21 23:30:29

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