METHOD FOR FILLING LIQUID DROP EJECTING HEAD WITH FUNCTIONAL FLUID, FUNCTIONAL FLUID SUPPLY UNIT, LIQUID DROP EJECTING APPARATUS EQUIPPED WITH THE UNIT, ELECTROOPTICAL DEVICE, METHOD FOR MANUFACTURING THE DEVICE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for filling a liquid drop ejecting head with a functional fluid, which enables the liquid drop ejecting head to be surely filled with the functional fluid, without generating air bubbles in piping leading to the liquid drop ejecting head, a functional supply unit and a liquid drop ejecting apparatus equipped with the same, and an electrooptical device, a manufacturing method therefor and electronic equipment.;SOLUTION: In this method for filling the liquid drop ejecting head with the functional fluid, firstly, air is removed so that the functional fluid can be hermetically sealed in a functional-fluid tank 102. In a filling process done after that, the functional fluid in the tank 102 is pressurized and fed so as to be infilled into a supply line 105 and an in-head passage of the liquid drop ejection head 20. The filling process is done by using a movable member 141 which faces into the tank 102 and which is constituted so as to be capable of being liquid-tightly wetted by and pressurized against the functional fluid in the tank 102.;COPYRIGHT: (C)2004,JPO&NCIPI