Initial filling method for functional liquid droplet ejection head, initial filling apparatus for functional liquid droplet ejection head, functional liquid droplet ejection head, functional liquid supplying apparatus, liquid droplet ejection apparatus, manufacturing method for electro-optic device, electro-optic device, and electronic apparatus

摘要

There is provided an initial filling method for a functional liquid droplet ejection head in which a filling liquid consisting essentially of a functional liquid or a solvent thereof is initially filled in a passage of a functional liquid drop-let-ejection-head for ejecting a functional liquid droplet on a workpiece. The method includes: a sealing step of sealing a functional liquid introducing port of the functional liquid droplet ejection head communicating with the passage of the head; an immersing step of immersing a head main body of the functional liquid droplet ejection head in the filling liquid stored in a sealed vessel; a pressure-reducing step of reducing pressure inside the sealed vessel to a predetermined degree of vacuum by exhausting the atmosphere inside the sealed vessel; and a pressure-restoring step of restoring the pressure inside the sealed vessel after the pressure-reducing step.