MASK VAPOR DEPOSITION METHOD AND APPARATUS, MASK AND MASK MANUFACTURING METHOD, DISPLAY PANEL MANUFACTURING APPARATUS, DISPLAY PANEL AND ELECTRONIC EQUIPMENT

摘要

PPROBLEM TO BE SOLVED: To provide a mask vapor deposition method capable of shortening mask vapor deposition time and performing mass production while realizing alignment of high accuracy. PSOLUTION: The mask vapor deposition method comprises a step of attracting a glass substrate 20 to be vapor-deposited by the electrostatic attractive force of a stage 1, a step of positioning the attracted glass substrate and a vapor deposition mask 2, and a step of vaporizing organic compounds forming an electroluminescence device to be vapor-deposited and depositing it on the glass substrate 20. In some cases, the vapor deposition mask has the electrostatic chuck function to enhance the adhesivity. PCOPYRIGHT: (C)2004,JPO&NCIPI