首页>
外国专利>
Mask vapor deposition method, mask vapor deposition system, mask, process for manufacturing mask, apparatus for manufacturing display panel, display panel, and electronic device
Mask vapor deposition method, mask vapor deposition system, mask, process for manufacturing mask, apparatus for manufacturing display panel, display panel, and electronic device
展开▼
机译:掩模蒸镀方法,掩模蒸镀系统,掩模,掩模的制造方法,显示面板的制造装置,显示面板以及电子设备
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method includes a step of attracting a glass substrate 20 that is a subject for deposition using the electrostatic attraction of a stage 1, a step of aligning the attracted glass substrate with a deposition mask 2, and a step of evaporating an organic compound that is a deposition material, used for forming electroluminescent elements so as to deposit the compound on the glass substrate 20. An electrostatic chucking function is provided to the deposition mask according to needs, whereby the adhesion is enhanced.
展开▼