THIN FILM FORMATION METHOD BY LASER ABRASION, AND SYSTEM THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a thin film formation method where a protective thin film for protecting a silica glass tubular material composing a high-intensity discharge lamp (HID lamp) belonging to a lighting field from the plasma of a metal halogen compound, mercury or the like being luminescent materials is formed by laser abrasion.;SOLUTION: In the thin film formation method by laser abrasion, when a laser beam is applied from the outside of a transparent material body 1 such as a glass tube or a glass tube ball, and is condensed on a target inside the transparent material body, the beam size is once expanded by a beam expander, and it is condensed on the target 2 using a lens having an f value of 1 such as an aspherical condenser lens and a Fresnel lens 6 to form a thin film inside the transparent material body.;COPYRIGHT: (C)2004,JPO&NCIPI