FORMATION OF THIN FILM USING LASER ABRASION AND LASER ABRASION DEVICE

摘要

PURPOSE: To provide a thin film forming method and device therefor for which laser abrasion to enable structural control of a thin film is used. ;CONSTITUTION: This laser abrasion device is composed of plural targets 8 which are disposed on a target holder 11 movable in parallel within a vacuum chamber 6 and vary in mounting heights, a condenser optical device for irradiating the surfaces of the targets 8 with a laser beam 2 emitted from a pulse laser oscillator 1 with lenses of different focal lengths at a rotating mechanism 14 and a substrate 9 to be deposited with the products from the targets 8. The targets 8 are moved in parallel during the formation of thin films in order to change the relative distance between the targets 8 and the substrate 9 during the formation of the thin films and the targets are irradiated with the laser beam by exchanging the lenses by the rotating mechanism 14.;COPYRIGHT: (C)1996,JPO