ORGANIC EL DISPLAY PANEL, MANUFACTURING METHOD OF UNFIXED SIDE SUBSTRATE OF ORGANIC EL DISPLAY PANEL AND MANUFACTURING DEVICE OF UNFIXED SIDE SUBSTRATE OF ORGANIC EL DISPLAY PANEL

摘要

PROBLEM TO BE SOLVED: To provide a working technology of a non-fixed side substrate preferable when adopted for an organic EL display panel of a top emission type having a superior image quality.;SOLUTION: Among packages 2 of the organic EL display of the top emission type in which the EL element part 1 is housed inside, a transparent non-fixed side substrate 22 of the side where the EL element part 1 is not fixed is manufactured. Onto the surface of a glass plate G, positioned at the prescribed position in a treatment container 3 to which a photoresist is applied, an etching solution supply system 6 supplies the etching solution L of a fluorinated acid series by injecting the solution from a nozzle 5 to upward in the form of mist, and the etching is carried out. The recess part whose fringe is a rib 220 is formed on the surface of the glass plate G. The glass plate G moves to the fixed nozzle 5 by a moving mechanism, and the etching solution L is homogeneously supplied. Because the flatness of the surface 221 of the inner side of the non-fixed side substrate 22 is higher, the quality of the displayed image becomes higher.;COPYRIGHT: (C)2004,JPO&NCIPI