And the method of manufacturing the optical integrated circuit element having a convex portion, optical communication transceiver device module which is manufactured by using the optical integrated circuit element

摘要

The present invention relates to an optical integrated circuit device having a protrusion, a fabrication method of the same and a module of an optical communication transmission and receiving apparatus using the same. The optical integrated circuit device comprises a semiconductor substrate, an convex portion formed on an upper surface of the semiconductor substrate and having a taper shape lateral surface, a protection film formed on a lateral wall surface of the convex portion, a first electrode formed on an upper surface of the convex portion, and a second electrode formed on an upper surface of the semiconductor substrate, wherein said convex portion is formed of a first current disconnection layer, a second current disconnection layer and a clad layer.