Integrated optical control element and a manufacturing method thereof, and optical integrated circuit element and an optical integrated circuit device including the same

摘要

PURPOSE: To make the change in optical multiplexing and demultiplexing ratio (reflectivity and transmittance) sufficiently smaller even to the changes of operating temp. and using optical wavelength by arranging a laminate having layers varying in refractive index from the equiv. refractive index of contiguous legions between a first waveguide and a second waveguide. ;CONSTITUTION: A wafer is composed of three regions; a distributed feedback type(DFB) laser part 134 having diffraction gratings 120, an optical branching part 135 consisting of multilayered reflection films 109 formed on a perpendicular surface 132 and a passive waveguide part 136. The incident light made incident at an incident angle θ from the DFB laser on the multilayered reflection films 109 is separated to the reflected light reflected at 2θ with the incident direction and the transmitted light advancing nearly rectilinearly. Reflectivity = 50% and transmittance = 50% are attained and the incident light is nearly equally bisected if, for example, the incident angle is set at 45° and the oscillation mode of the DFB laser at a TM mode. Since the multilayered reflection films 109 are controlled in their refractive index with accuracy of ≤1%, the uniformity, controllability and reproducibility of the reflectivity and transmittance are high and the variations in the reflectivity characteristics and transmittance characteristics are decreased.;COPYRIGHT: (C)1996,JPO