Method for evaluating the output signals of two pressure sensors and a pressure measuring device having two pressure measuring sensor, and a pressure measuring head with the device

摘要

PURPOSE: To accurately measure continuously a measuring area wider than the measuring area of each sensor element, by combining a plurality of pressure sensors. ;CONSTITUTION: A Pirani sensor 1 is used in combination with a cold cathode electric dissociation sensor 3, and the output signals of these sensors 1, 3 are supplied to a weighting unit 5, and also to a measurement evaluating unit 7. The evaluating unit 7 produces an output signal A as a signal to represent a physical quantity (p). The intermediate value region ΔP is determined, and within the region, measurement is made about the transition range from the sensor 1 to the other 3. Also the output signal A of the unit 7 is supplied to the weighting unit 5, and a weighting function (f) is formed in the unit 5 in accordance with the sensor output signal and the output signal of the evaluating unit 7. Also an output signal in accordance with the sensor output signal and the function (f) is formed in the evaluating unit 7.;COPYRIGHT: (C)1995,JPO