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Mask pattern data creation system and data creation method
Mask pattern data creation system and data creation method
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机译:掩模图案数据创建系统和数据创建方法
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摘要
PROBLEM TO BE SOLVED: To provide a mask pattern data generation system/method having no-return work on the matching work of mask pattern data.;SOLUTION: The mask pattern data generating system is provided with a conversion table generation processing means 104 for generating process conversion information from layer information data and shrink information data of a main chip side and a hardware macro side, a conversion information addition processing means 106 adding process conversion information to an arrangement information part as additional information and a conversion processing means 107 converting the process of hardware macro pattern data, based on additional information and outputting mask pattern data of the main chip for mounting the hardware macro of the execution result to an outer storage device are installed as a process conversion means 103, which converts hardware macro pattern data of a manufacturing process different from a main chip loading plural hardware macros into the manufacture process of the main chip and arranges it in the lower-order hierarchy of mask pattern data of the main chip.;COPYRIGHT: (C)2001,JPO
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