The vacuum absorbing the production manner of the optical disk origin board, and the chucking table null glass origin board

摘要

PURPOSE: To provide an optical master disk on which a photoresist coating film having a uniform film thickness is formable and which has rugged patterns of precise shapes. ;CONSTITUTION: A chucking table which is approximately uniform in the state of contact with a glass master disk in a region where the rugged patterns are formed is used as the chucking table at the time of placing the glass master disk on the chucking table and spin coating the glass master disk with a photoresist. Such chucking table includes a table which has outer peripheral ribs 6a and inner peripheral ribs 6b outside the regions formed with the rugged patterns and is constituted to be placed with the glass master disk by these ribs 6a, 6b.;COPYRIGHT: (C)1995,JPO