Production manner of optical disk origin board, optical disk origin board, production manner null of stamper for optical disk and stamper for optical disk

摘要

PROBLEM TO BE SOLVED: To provide a process for producing an optical master disk capable of adequately forming patterns of different depths with desired widths, an optical master disk, a stamper for the optical disk and a process for producing the stamper for optical disk. ;SOLUTION: The optical master disk 1 is formed by washing a glass substrate 2, then subjecting the substrate to an HMDS treatment, forming a first photoresist layer 3 by using a positive type resist material and subjecting the layer to prebaking. After the surface of the first photoresist layer 3 is reverse sputtered, an intermediate layer 4 is formed by using ITO and the substrate of the intermediate layer is subjected to the HMDS treatment and thereafter, a second photoresist layer 5 is formed by using the positive type resist material and is subjected to prebaking. The optical master disk 1 is exposed by recording light La, Lb, by which latent images 3a, 5a, 5a are formed thereon. The optical master disk is then subjected to etching and developing to form half grooves and pits.;COPYRIGHT: (C)1998,JPO