Control device and microwave power system of microwave power system

摘要

PROBLEM TO BE SOLVED: To accelerate the rise of a microwave output in a microwave power source system.;SOLUTION: The controller for the microwave power source system converts a power command signal Pc into a current command signal Ic via a transfer function G₁ of a proportional element. The controller also converts the difference ε₁ between a fed-back output power signal Pf and the power command signal Pc into a current command signal I₃ via a transfer function G₃ or the like of a proportional integrating element. The controller realizes a single control loop in the controller by converting the signal obtained by adding the signal I₃ to the current command signal Ic into an output current command signal Ix to a high-voltage power source.;COPYRIGHT: (C)2003,JPO