首页>
外国专利>
Application to extreme ultraviolet light generation of the device and the high peak power laser device
Application to extreme ultraviolet light generation of the device and the high peak power laser device
展开▼
机译:在器件和高峰值功率激光器件的极紫外光产生中的应用
展开▼
页面导航
摘要
著录项
相似文献
摘要
At about the same time, the apparatus, and a (14) means for directing (16) the target point substantially the same pulsed laser and three (2,4,6), the pulses are supplied at least a light pulse . The laser is pumped by a diode that operates continuously.
展开▼