Sample electrification measuring method and electric charge corpuscular ray device

摘要

As for purpose of this invention, focusing gap, magnification ratio fluctuation of the electric charge corpuscular ray device which it occurs with the electrification on the sample and measuring of length value error is decreased is offer of ideal electric charge corpuscular ray lighting method, and the electric charge corpuscular ray device.With this invention, while passing the sample which is carried by the carrying mechanism of the electric charge corpuscular ray, the technique which measures the electric potential distribution on the sample due to the electrostatic electrometer which measures the electric potential on the sample is proposed in order to achieve the above-mentioned purpose. In addition, the local electrification of specific place on the sample is measured, global electrification quantitative amount is separated from the electrification quantity and the technique which is measured is proposed. Furthermore, the electrification quantity of specific place, is measured at least under two charged particle optical conditions, change of the size measurable quantity which uses the electric charge corpuscular ray which accompanies the electrification quantitative change of specific place is measured, the technique which revises measuring of length value, or magnification ratio on the basis of this change is proposed.