Electrode forming method of a piezoelectric vibrating piece, the mask for forming an electrode of the piezoelectric resonator element, a piezoelectric vibrator and a piezoelectric oscillator

摘要

PROBLEM TO BE SOLVED: To provide a method for forming an electrode for a piezoelectric vibrating bar capable of forming a main electrode of a desired shape at an accurate position at a low cost by a physical vapor deposition method with respect to an inverted mesa piezoelectric vibrating bar and a mask for electrode formation for a piezoelectric vibrating bar. SOLUTION: In this mask 10 for electrode formation, a protrusion 14 turned to the periphery of a main electrode formation part 4a in the inverted mesa piezoelectric vibrating reed 4 is formed at the periphery of a main electrode formation part 16a in an opening part 16 of the mask 10 for electrode formation, and fitting projecting parts 15 that can be fitted into fitting recessed parts 5 formed at prescribed positions in a wafer 3 where the inverted mesa piezoelectric vibrating reed 4 is formed are formed at prescribed positions.