PIEZOELECTRIC VIBRATING PIECE, STRUCTURE OF EXCITATION ELECTRODE THEREOF, ELECTRODE FORMING METHOD, PIEZOELECTRIC DEVICE, CELLULAR TELEPHONE DEVICE EMPLOYING PIEZOELECTRIC DEVICE AND ELECTRONIC EQUIPMENT EMPLOYING PIEZOELECTRIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide the structure of an excitation electrode and a forming method thereof capable of efficiently avoiding an increase in CI value after film forming by preventing generation of partial peeling on an interface between a substrate layer and an electrode layer.;SOLUTION: In the electrode forming method for forming a metallic film on the surface of a piezoelectric material by sputtering to form an excitation electrode serving as a driving electrode of a piezoelectric vibrating piece, a substrate layer 52 made of chromium is formed on the surface of the piezoelectric material by sputtering, a metal 53 of silver or gold and a chromium 54 are each film-formed with the thinnest film thickness by sputtering on the surface of the substrate layer, and an electrode layer 56 made of silver or gold is formed with a necessary film thickness on the surface thereof after film forming of the silver or gold and chromium. The above continuous sputtering processes are performed, thereby forming a diffusion layer 55 in which the chromium is diffused on the silver or gold between the substrate layer and the electrode layer.;COPYRIGHT: (C)2005,JPO&NCIPI