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Thin film constitution element, for example, production method, and thin film constitution element of thin film high pressure sensor
Thin film constitution element, for example, production method, and thin film constitution element of thin film high pressure sensor
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机译:薄膜构成要素,例如制造方法以及薄膜高压传感器的薄膜构成要素
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摘要
The thin film constitution element, for example, production method, and the thin film constitution element of the thin film high pressure sensor are proposed, diaphragm layer (10,20) on the non electric conduction surface, the measurement element, for example, extend and the measurement strip (30) resistant layer because it constitutes is accumulated, contact layer system for electric contact connection of the measurement element (41) in order on the particular measurement element, each territory and diaphragm layer of contact layer type (10,20) with the measurement element (30) for the territory to have been located between, is accumulated. As for this, for example, although the high pressure sensor which possesses the capacitance where each contact terminal area of contact layer type is formed symmetrically is formed it is used.
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