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Thin film constitution element, for example, production method, and thin film constitution element of thin film high pressure sensor

机译:薄膜构成要素,例如制造方法以及薄膜高压传感器的薄膜构成要素

摘要

The thin film constitution element, for example, production method, and the thin film constitution element of the thin film high pressure sensor are proposed, diaphragm layer (10,20) on the non electric conduction surface, the measurement element, for example, extend and the measurement strip (30) resistant layer because it constitutes is accumulated, contact layer system for electric contact connection of the measurement element (41) in order on the particular measurement element, each territory and diaphragm layer of contact layer type (10,20) with the measurement element (30) for the territory to have been located between, is accumulated. As for this, for example, although the high pressure sensor which possesses the capacitance where each contact terminal area of contact layer type is formed symmetrically is formed it is used.
机译:提出了例如薄膜构成要素,制造方法以及薄膜高压传感器的薄膜构成要素,将非导电面上的隔膜层(10,20),例如测量元件延伸。并且由于构成的测量带(30)的电阻层是累积的,用于在特定的测量元件上依次电连接测量元件(41)的接触层系统,接触区域类型(10,20)的每个区域和隔膜层)和测量元素(30)一起用于要位于其间的区域进行累加。对此,例如使用形成具有对称地形成有接触层型的各接触端子区域的电容的高压传感器。

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