Method of manufacturing the abrasive sheet for polyurethane foam, polyurethane foam, abrasive sheet, and polishing pad

摘要

PPROBLEM TO BE SOLVED: To provide a polishing sheet and a polishing pad which can effectively inhibit the formation of scratches, further a polyurethane foam to be used for the polishing sheet and the polishing pad, its manufacturing method, a method for manufacturing a semiconductor device and the like. PSOLUTION: The method for manufacturing the polyurethane foam for the polishing sheet comprises a step of mixing a first component containing an isocyanate group-containing compound with a second component containing an active hydrogen group-containing compound, and foreign substances present in the raw materials of both the above components are removed with the use of a ≥200 mesh filter (an opening of screen of ≤74 μm), and thereafter both the components are mixed. PCOPYRIGHT: (C)2004,JPO