Creation device null of exposure data for mask

摘要

PURPOSE: To provide a device capable of forming data for mask exposing from design data of circuit patterns of a sample without making special operation. ;CONSTITUTION: This forming device of exposure data for the mask forms the exposure data for the purpose of providing the mask with original patterns 21 corresponding to the circuit patterns 2 in accordance with the design data of the circuit patterns 20 to be transferred from one sheet of the mask to the sample. The forming device described above is provided with a division form determining means which determines the form of dividing and forming the original patterns 21 in plural small regions 21 of the sizes previously assigned on the mask and an arrangement determining means which determines the arrangement of the small regions 2a on the mask in such a manner that the boundary regions 2b of the prescribed width prohibiting the formation of the original patterns 21 are generated between the small regions 2a.;COPYRIGHT: (C)1995,JPO