Extraordinary hall effect sensors and arrays

摘要

An EHE magnetic sensor has an alloy of the form R_y[M_xN_100−x]_100−y, M being Fe, Co, Ni, or magnetic alloys that contain Fe, Co or Ni. N is from the fifth or sixth period of the periodic table. If present, R is a rare earth element. In one embodiment, the alloy exhibits a Temperature Coefficient ≦0.003 K^−1 in the room temperature region. Various geometric shapes of sensors are presented including one and two-dimensional arrays of sensors for measuring spatial magnetic fields. Vias (98, 100, 102, 104) defined by a substrate (92) onto which an alloy layer (106) is disposed are filled with a conductive material in certain embodiments of arrays. Methods are disclosed for making a sensor, for designing a sensor at a thickness, for determining maximum acceptable current through a sensor, for reducing Joule heating of a sensor, and for making an array of sensors.