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EXTRAORDINARY HALL EFFECT SENSORS AND ARRAYS
EXTRAORDINARY HALL EFFECT SENSORS AND ARRAYS
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机译:非常规霍尔效应传感器和阵列
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摘要
An EHE magnetic sensor has an alloy of the form MxNloo-x, M being Fe, Co, Ni, or magnetic alloys that contain Fe, Co or Ni. N is from the fifth or sixth period of the periodic table. The sensor includes a layer of the alloy at a thickness t between 30Å and 1600Å, inclusive, and voltage and sensing wires to the sensor may also be made from the same alloy. The alloy may further include a rare earth element up to 20°/0. In one embodiment, the alloy exhibits a Temperature Coefficient f 0.003 K-1 in the room temperature region. Various geometric shapes of sensors are presented including one and two-dimensional arrays of sensors for measuring spatial magnetic fields. Vias (98, 100, 102, 104) defined by a substrate (92) onto which an alloy layer (106) is disposed are filled with a conductive material in certain embodiments of arrays.
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机译:EHE磁传感器具有MxNloo-x形式的合金,M为Fe,Co,Ni或包含Fe,Co或Ni的磁性合金。 N来自周期表的第五或第六个周期。传感器包括一层厚度在30Å至1600Å(含)之间的合金层,并且到传感器的电压线和感应线也可以由相同的合金制成。该合金可以进一步包括高达20°/ 0的稀土元素。在一个实施方案中,该合金在室温区域显示出温度系数f 0.003 K -1。提出了传感器的各种几何形状,包括用于测量空间磁场的传感器的一维和二维阵列。在阵列的某些实施例中,由在其上布置有合金层(106)的衬底(92)限定的通孔(98、100、102、104)填充有导电材料。
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