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Vibrating pumping stage for molecular vacuum pumps, and molecular vacuum pump with vibrating pumping stages
Vibrating pumping stage for molecular vacuum pumps, and molecular vacuum pump with vibrating pumping stages
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机译:用于分子真空泵的振动泵台,以及具有振动泵台的分子真空泵
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摘要
A micro-electro-mechanical vibrating pumping stage comprises a silicon substrate (15) on which there are formed a single-layer or multilayer oscillating assembly (27; 127; 227; 327) with a vibrating membrane and a device controlling the membrane in order to provide its oscillation with respect to the substrate. A molecular vacuum pump incorporates this vibrating pumping stage.
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