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Method of forming non-volatile resistance variable devices, method of forming a programmable memory cell of memory circuitry, and a non-volatile resistance variable device

机译:形成非易失性电阻可变装置的方法,形成存储电路的可编程存储单元的方法以及非易失性电阻可变装置

摘要

A chalcogenide comprising material is formed to a first thickness over the first conductive electrode material. The chalcogenide material comprises AxBy. A metal comprising layer is formed to a second thickness over the chalcogenide material. The metal comprising layer defines some metal comprising layer transition thickness for the first thickness of the chalcogenide comprising material such that when said transition thickness is met or exceeded, said metal comprising layer when diffused within said chalcogenide comprising material transforms said chalcogenide comprising material from an amorphous state to a crystalline state. The second thickness being less than but not within 10% of said transition thickness. The metal is irradiated effective to break a chalcogenide bond of the chalcogenide material at an interface of the metal and chalcogenide material and diffuse at least some of the metal into the chalcogenide material.
机译:包含硫族化物的材料在第一导电电极材料上形成为第一厚度。硫族化物材料包括A x B y 。在硫族化物材料上形成第二厚度的含金属层。含金属的层限定了含硫族化物的材料的第一厚度的一些含金属的层过渡厚度,使得当达到或超过所述过渡厚度时,当所述含金属的层在所述含硫族化物的材料内扩散时,将所述含硫族化物的材料从无定形转变为态到结晶态。第二厚度小于但不大于所述过渡厚度的10%。对该金属进行辐照可有效地在金属和硫属化物材料的界面处断开硫属化物材料的硫属化物键并使至少一些金属扩散到硫属化物材料中。

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