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Method of doping silicon, metal doped silicon, method of making solar cells, and solar cells
Method of doping silicon, metal doped silicon, method of making solar cells, and solar cells
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机译:掺杂硅的方法,金属掺杂的硅,制造太阳能电池的方法以及太阳能电池
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摘要
A low temperature process for forming a metal doped silicon layer in which a silicon layer is deposited onto a substrate at low temperatures, with a metal doping layer then deposited upon the silicon layer. This structure is then annealed at low temperatures to form a metal doped semiconductor having greater than about 11020 dopant atoms per cm3 of silicon.
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