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Electroless deposition of cu-in-ga-se film

机译:Cu-Ga-Ga膜的化学沉积

摘要

A process for depositing copper-indium-gallium-selenide thin films on substrates, including foreign substrates, occurs in a chemical bath that includes a buffer solution and does not require external current as a catalyst. Formation of the chemical bath includes compounds of each of the constituent elements dissolved in deionized water and the addition of pHydrion buffers likewise dissolved. Deposition occurs as a result of the introduction of both a working electrode and a counter electrode. The deposited thin film is further processed through physical vapor deposition of additional indium, gallium, and selenium in order to fine-tune the stoichiometry of the resultant thin film.
机译:在包括异物衬底的衬底上沉积铜铟镓硒化物薄膜的方法发生在包括缓冲溶液且不需要外部电流作为催化剂的化学浴中。化学浴的形成包括溶解在去离子水中的每个组成元素的化合物,以及同样溶解的pHydrion缓冲液的添加。由于引入了工作电极和反电极而发生沉积。通过物理气相沉积另外的铟,镓和硒来进一步处理沉积的薄膜,以便微调所得薄膜的化学计量。

著录项

  • 公开/公告号US2004131792A1

    专利类型

  • 公开/公告日2004-07-08

    原文格式PDF

  • 申请/专利权人 BHATTACHARYA RAGHU N.;

    申请/专利号US20030451048

  • 发明设计人 RAGHU N. BHATTACHARYA;

    申请日2003-06-17

  • 分类号B05D1/18;

  • 国家 US

  • 入库时间 2022-08-21 23:19:21

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