Lsi inspection method and apparatus, and ls1 tester

摘要

A test of an LSI device under test (20) including a physical layer section (21) which has a high-speed interface function is performed. An LSI device test unit (1) including a reference LSI device (10) which has already been confirmed as being non-defective is placed on a test board (2), and high-speed pins of the LSI devices (10, 20) are connected to each other. An LSI tester (3) accesses logical layer sections (12, 22) at a low speed to control a high-speed communication between physical layer sections (11, 21) and read received data, and determines whether or not the LSI device under test (20) is defective.