LSI inspection module, control method for LSI inspection module, communication method between LSI inspection module and inspection apparatus, and LSI inspection method

摘要

In an LSI inspection module, an I/O interface compatible with the I/O interface of an LSI as an inspection target is provided and testing data is stored in a memory for test data. During inspection, an LSI inspection apparatus controls the interface control circuit of the inspection module by setting the value of a status control flag and performs the outputting of the testing data to the target LSI and the reading of result data outputted from the target LSI in accordance with the testing data.