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Method for forming metal oxide film and method for forming secondary electron emission film in gas discharge tube
Method for forming metal oxide film and method for forming secondary electron emission film in gas discharge tube
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机译:在气体放电管中形成金属氧化物膜的方法和形成二次电子发射膜的方法
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摘要
According to the present invention, there is provided a method for forming a metal oxide film comprising, when a metal oxide film is formed by conducting a thermal treatment on a coating film containing an organic metal compound formed on an inner wall of a tube, performing an ultraviolet irradiation treatment or an ozone treatment on the coating film prior to or simultaneously with the thermal treatment.
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