Flexural device-based suspension having high compliance in a direction of travel and low compliance in a direction orthogonal thereto

摘要

The flexural device-based suspension suspends a movable element with high compliance in a direction of travel and low compliance in a direction orthogonal to the direction of travel. The suspension comprises two flexural devices and a constraining element. The two flexural devices are connected to the movable element. Each of the flexural devices includes an elongate floating beam disposed substantially parallel to the direction of travel. The constraining element is for constraining relative motion of the floating beams in the direction of travel and for allowing the floating beams to move freely relative to one another in the orthogonal direction.