首页>
外国专利>
Methods for dry etching at low substrate temperatures using gas chemistry including a fluorocarbon gas and a gas including oxygen
Methods for dry etching at low substrate temperatures using gas chemistry including a fluorocarbon gas and a gas including oxygen
展开▼
机译:在低衬底温度下使用包括碳氟化合物气体和含氧气体的气体化学方法进行干法刻蚀的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Methods for fabricating semiconductor devices are described, including methods which improve an etching selection ratio of a film to be etched against metal silicide, Si, and photoresist. One method for fabricating a semiconductor device includes the steps of forming Ti silicide films 9a-9c on the gate electrode 3 and the diffusion layers 6 and 7 of source/drain regions, forming an interlayer dielectric film 10 on the Ti silicide films, and dry-etching the interlayer dielectric film to form in the interlayer dielectric film 10 a contact hole 10a located above the gate electrode, and contact holes 10b and 10c located above the diffusion layers of the source/drain regions, wherein etching gas used for the dry-etching is gas including at least fluorocarbon gas and one of O2 gas and O3 gas, and the temperature of the semiconductor substrate is 30° C. or lower when the dry-etching is conducted.
展开▼
机译:描述了用于制造半导体器件的方法,包括改善要蚀刻的膜相对于金属硅化物,Si和光致抗蚀剂的蚀刻选择比的方法。一种制造半导体器件的方法包括以下步骤:在硅衬底上形成硅化钛膜 9 B> a I>- 9 B> c I>。栅电极 3 B>和源/漏区的扩散层 6 B>和 7 B>,形成层间介电膜 10 B>在硅化钛膜上,干蚀刻层间介电膜以在层间介电膜 10 B>中形成位于上方的接触孔 10 B> a I>栅电极和位于源极/漏极扩散层上方的接触孔 10 B> b I>和 10 B> c I>其中用于干蚀刻的蚀刻气体是至少包括碳氟化合物气体和O 2 Sub>气体和O 3 Sub>气体之一的气体,以及半导体衬底的温度。是30°当进行干法蚀刻时,C。或更低。
展开▼