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Target for transparent electroconductive film, transparent electroconductive material, transparent electroconductive glass and transparent electroconductive film
Target for transparent electroconductive film, transparent electroconductive material, transparent electroconductive glass and transparent electroconductive film
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机译:透明导电膜,透明导电材料,透明导电玻璃和透明导电膜的靶
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摘要
The invention includes sintered products for transparent electroconductive films, which are formed into films in a stable and efficient manner through sputtering or the like, sputtering targets of the sintered products, and transparent electroconductive glass and films formed from the targets. The transparent electroconductive glass and films have good transparency, good electroconductivity and good workability into electrodes, and are therefore favorable to transparent electrodes in organic electroluminescent devices as realizing good hole injection efficiency therein. The sintered products contain constituent components of indium oxide, tin oxide and zinc oxide in specific atomic ratios of the metal atoms, and optionally contain specific metal oxides of ruthenium oxide, molybdenum oxide, vanadium oxide, etc.
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