Seismic emergency response system for use in a wafer fabrication plant

摘要

In general, the present invention provides a seismic emergency response system (SERS) to control fabrication equipment and material flow for prevention of damage to wafers and equipment within a wafer fabrication plant during an earthquake. The SERS having a facility manager control system having one or a plurality of seismic detection devices, and at least one voting logic device for outputting an alarm triggering signal to a computer integrated manufacturing system; and a computer integrated manufacturing system having an emergency response system and an equipment server (tool application program) for sending a pause equipment command to an associated piece of equipment and a hold lot command to a material execution system to prevent damage of wafers during an earthquake. Optionally provided is one or a plurality of false alarm prevention devices and one or a plurality of enabling switches provided to selectively enable or disable the SERS.