Device for processing a substrate, drum for rotary processing of a first layer of a substrate in multiple layers, and,Methods for processing a three-dimensional structure in the first layer of a substrate.And to attach a tool to a tool superfu00eccie plan of a device to process a substrate.

摘要

"The device to process a substrate processing drum for rotating a first layer of a substrate in multiple layers, and,Methods for processing a three-dimensional structure in the first layer of a substrate.And to attach a tool to a tool superfu00eccie plan of a device to process a substrate.A device and method for processing a substrate.Characterized by the fact of medium strength flexible absorber to be filled in at least part of a plan to tool and / or response plan so as to absorb, locally.The forces applied by the plans.The means of absorbing flexible forces having properties as the spring so that it is adapted to be elasticamente deformed when the plan of tool and the response plan are pressedS one against the other.