Process and apparatus for mocvd growth of compounds including gaasn alloys using an ammonia precursor with a catalyst

摘要

"PROCESS AND APPARATUS FOR MOCVD GROWTH OF COMPOUNDS INCLUDING GAASN ALLOYS, USING AN AMMONIA PRECURSOR WITH A CATALYST". The present invention relates to a process of using ammonia to form a GaAs alloy with nitrogen atoms as described. The process includes the operation of introducing ammonia with an agent to aid in the decomposition of ammonia in a reaction chamber with the GaAs film. Agents that are described include radiation as well as compounds including aluminum.