DUAL FACE SHOWER HEAD ELECTRODE FOR A MAGNETRON PLASMA GENERATING APPARATUS

摘要

A dual face shower head electrode (10) for a magnetron plasma-generating apparatus, comprising: (a) a pair of face plates (11, 11') defining a plurality of holes (12) for transporting a gas therethrough, said face plates being electrically insulated from each other and 3474 ט" ז בשבט התשס" ד - February 8, 2004 forming an interior space therebetween; (b) a means (19) for supporting said face plates in a position essentially parallel to each other to form the interior space, said supporting means being electrically insulated from said face plates; (c) at least one magnet (13) supported in the interior space, said at least one magnet being electrically insulated from said face plates and said means for supporting said face plates; (d) means (17, 18) for introducing gas into the interior space and out through the plurality of holes in said face plates in a manner such that the flow rate of the gas through each hole is substantially the same; (e) means (20, 20') for providing electrical power to at least one of said face plates; wherein the interior space is essentially gas tight except for the plurality of holes and said means for introducing gas.