DUAL FACE SHOWER HEAD ELECTRODE FOR A MAGNETRON PLASMA GENERATING APPARATUS

摘要

An electrode (10) is provided which can improve the efficiency and quality ofplasma-generated coatings in a plasma enhancedchemical vapor deposition coating device. The electrode comprises dual showerhead faces (11, 11') containing in the preferred mode aplurality of magnets (13) which are aligned so that the poles of the magnetsface in the same direction to thus generate two magnetronfaces for each set of magnets.