Nanofabrication method, e.g. for sensors, involves using punch to transfer nanopattern from master to target surface, where master pattern is prepared by particle lithography

摘要

The master pattern is prepared by particle lithography using colloidal nanoparticles (7), and then transferred to the punch (3) by casting the latter directly from the master surface. A method for providing surfaces with patterns on the nanometer scale comprises transferring the pattern from a master (2) to a punch and then using the punch to transfer this pattern to the target surface (5). The master pattern is prepared by particle lithography, in which the individual particles are colloidal particles with a typical size of 1 nm to 1 micron. The particle pattern components are distributed in a random or ordered fashion over the master surface, and the master pattern is then transferred to the punch by casting the latter directly from the master surface. Independent claims are also included for; (1) The master; (2) The apparatus used to carry out the above method; and (3) Devices with a surface pattern prepared by this method.