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STRAY LIGHT SUPPRESSION STRUCTURES USING A WAVEGUIDE AND ANGLED, DEEP ETCHED TRENCHES FILLED WITH AN ABSORBING MATERIAL
STRAY LIGHT SUPPRESSION STRUCTURES USING A WAVEGUIDE AND ANGLED, DEEP ETCHED TRENCHES FILLED WITH AN ABSORBING MATERIAL
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机译:使用波浪形和倾斜,刻蚀的沟槽并填充有吸收性材料的杂散光抑制结构
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摘要
The present invention relates to an optical waveguide structure comprising a waveguide input section (14) and a waveguide output section (16), at least one of which having a straight geometry, and a single trench (26) formed adjacent to one of said sections (14, 16). The trench is adapted to absorb stray light within said structure and extends obliquely relative to the adjacent section (14, 16).
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